STRUCTURE COMPOSED OF CERAMIC AND METAL AND ELECTROSTATIC CHUCK DEVICE PRODUCED BY USING THE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To obtain a structure having excellent strength and durability by directly bonding a ceramic material containing magnesia ceramic to a metal having a thermal expansion coefficient comparable to that of the ceramic material. SOLUTION: The metal directly solderable to magnesia ceramic is those having a thermal expansion coefficient comparable to that of magnesia ceramic such as ferrite-based stainless steel. The thermal expansion coefficient of magnesia is comparably large (14×10<-6> (1/ deg.C) and the difference from that of a metal such as stainless steel (12×10<-6> to 15×10<-6> (1/ deg.C) is small and, accordingly, magnesia can be soldered these metals. Even a large-sized part (ϕ150 mm toϕ300 mm) can be soldered by this process. An alloy having high thermal expansion coefficient such as aluminum or an aluminum allay is soldered by interposing a composite material of a ceramic and the metal (e.g. Al-SiC) between both members according to the thermal expansion coefficient of the alloy.