发明名称 Method for pulling a single-crystal semiconductor
摘要 A method for pulling a <110> single-crystal silicon aims at preventing the crystal from being cut in diameter-reducing and suppress the increase in cost due to the cut prevention to the minimum. In the step for forming a diameter-reduced portion performed prior to the step for growing a <110> single-crystal silicon by the Czochralski method, a magnetic field having a strength of 500 gauss or more is applied and while suppressing a melt surface vibration and temperature variation, the crystal diameter is reduced to 2.00 mm or smaller.
申请公布号 US5911823(A) 申请公布日期 1999.06.15
申请号 US19960762584 申请日期 1996.12.10
申请人 KOMATSU ELECTRONICS METALS CO., LTD. 发明人 SONODA, KOUJI;MIMURA, TOSHIO
分类号 C30B15/36;C30B15/22;C30B15/30;C30B29/06;C30B33/04;(IPC1-7):C30B15/20 主分类号 C30B15/36
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