| 摘要 |
<p>A system for producing a semiconductor wafer includes a production progress comparing/calculating unit, a fabrication device status monitor step, an inventory control step, and a process shelf controller step. In response to a timing signal from the fabrication device status monitor step, the production progress comparing/calculating unit determines a semiconductor wafer to be processed next, and the determined semiconductor wafer is automatically searched for on a process shelf. The fabrication devices of a semiconductor wafer production line start processing semiconductor wafers at suitable times thereby producing semiconductor wafers according to a production plan and meeting a delivery time for the semiconductor wafers.</p> |
