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发明名称
VACUUM PROCESS MACHINE
摘要
申请公布号
KR100204976(B1)
申请公布日期
1999.06.15
申请号
KR19950001403
申请日期
1995.01.26
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
HARAGUCHI, HIDEO;SUJUKI, MASAKI;ISHIDA, TOSHIMICHI
分类号
H01L21/677;B65G49/07;C23C14/00;C23C16/54;H01L21/302;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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