| 摘要 |
<p>PROBLEM TO BE SOLVED: To facilitate the tracking down of the cause of failure by installing a calculation means; which leads out the operating conditions of each part from each output of sensors arranged in each part of the device by the calculation, searches the database showing the relation between the phenomenon and the cause being set in advance at the time of generating the malfunction from the sensor output and the calculated result, and estimates the cause of the malfunction; and a display/alarm means. SOLUTION: Along with the oscillation of the laser light, a total reflection mirror temperature, the pressure and the gas temperature in a discharge tube, the original pressure and the flow volume of each gas for the laser output and operation, and the like are detected by a total reflection mirror temperature sensor 21, a sensor 23 for gas pressure in the discharge tube, a gas temperature sensor 20, a laser output sensor 10 and the like at the constant time interval, and are input to a central processing unit CPU. The operating condition of each part is calculated from the input data, and the existence of the malfunction is judged by comparing the data with the reference value. At the time of generating the malfunction, the cause of the malfunction is estimated by searching the database with the calculating result as a search key, is output to a display means to carry out the necessary actions such as alarming and the stop of the device operation.</p> |
