| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide the recovering method and device of the rare gas capable of efficiently recovering the rare gas discharged from the device using the rare gas, moreover, capable of stably supplying the rare gas having a prescribed purity to the device using the rare gas, and also capable of reducing consumption of the rare gas. SOLUTION: In the case of recovering the rare gas in a waste gas discharged from the device using the rare gas operated under the reduced pressure, an introduction of the waste gas to a recovery system and discharging to a discharge system are switched in a reduced state, and also the switching operation is executed in accordance with a concn. of an impurity component incorporated in the waste gas and the operating state of the device using the rare gas.</p> |
