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发明名称
WAFER FOR CHECKING MASK'S DEFECT AND MANUFACTURING METHOD THEREOF
摘要
申请公布号
KR100204413(B1)
申请公布日期
1999.06.15
申请号
KR19950047097
申请日期
1995.12.06
申请人
HYUNDAI ELECTRONICS IND. CO., LTD
发明人
JUN, JE-HA;JIN, HYUN-KYUN;LEE, SEUN-GUK
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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