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发明名称
A CLEANING APPARATUS OF A SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100203398(B1)
申请公布日期
1999.06.15
申请号
KR19960028236
申请日期
1996.07.12
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
YOO, JUNG-SIK;PARK, WAN-SIK
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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