Stable hydride source compositions for manufacture of semiconductor devices and structures,申请号AU19990015285-传众专利搜索

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发明名称	Stable hydride source compositions for manufacture of semiconductor devices and structures
摘要
申请公布号	AU1528599(A)	申请公布日期	1999.06.15
申请号	AU19990015285	申请日期	1998.11.18
申请人	ADVANCED TECHNOLOGY MATERIALS, INC.	发明人	MICHAEL A. TODD;THOMAS A. BAUM;GAUTAM BHANDARI
分类号	C01B4/00;C01B6/02;C01B6/06;C23C16/18;C23C16/448;F17C11/00;H01L21/205	主分类号	C01B4/00
代理机构		代理人
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