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发明名称
INSULATING FILM ETCHING METHOD
摘要
申请公布号
KR100198651(B1)
申请公布日期
1999.06.15
申请号
KR19960020656
申请日期
1996.06.10
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
YUN, KI-CHAE
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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