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经营范围
发明名称
CVD FUNRACE
摘要
申请公布号
KR100192444(B1)
申请公布日期
1999.06.15
申请号
KR19950048247
申请日期
1995.12.11
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
YOON, YOUNG-II
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
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