| 摘要 |
PROBLEM TO BE SOLVED: To prevent such a malfunction that a lumpy metal powder is peeled off by the overwork of a magnet filter for collecting the metal powder contained in a processing soln. SOLUTION: A magnet filter 3 is provided in the circulating line 1 of a cleaning soln. to collect the metal powder mixed in the cleaning soln. with the magnet filter 3. In this case, the detecting element 4 of an ultrasonic sensor for detecting the amt. of the metal powder depositing on a powder collecting cylinder is furnished to the filter 3, the opening of the solenoid valves V1 to V5 of the circulating line 1, cleaning circuit 5 and discharge circuit 6 is controlled by the detection signal of the element 4, and the metal powder depositing on the filter 3 is cleaned off. |
