A DEFECT CHECK APPARATUS,申请号KR19950030332-传众专利搜索

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发明名称	A DEFECT CHECK APPARATUS
摘要
申请公布号	KR100203530(B1)	申请公布日期	1999.06.15
申请号	KR19950030332	申请日期	1995.09.16
申请人	KABUSHIKI KAISHA TOSHIBA	发明人	YAMASITA, KYOJI
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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