发明名称 Method and apparatus for applying a layer of flowable coating material to a surface of an electronic component
摘要 A flowable coating material, such as a liquid having solids in suspension, such as spin-on glass, is applied to a surface of an electronic component by placing the component in a centrifuge and spinning the component about a first axis so that the liquid material is forced against the surface of the component. The component may also be rotated about its own axis so that the liquid material is distributed along the surface of the component.
申请公布号 US5912046(A) 申请公布日期 1999.06.15
申请号 US19970854203 申请日期 1997.05.09
申请人 FORM FACTOR, INC. 发明人 ELDRIDGE, BENJAMIN N.;KHANDROS, IGOR Y.;MATHIEU, GAETAN L.
分类号 B23K3/06;B23K20/00;C25D7/12;G01R1/067;G01R1/073;G01R3/00;G01R31/28;H01L21/00;H01L21/48;H01L21/56;H01L21/60;H01L21/603;H01L21/66;H01L23/48;H01L23/485;H01L23/49;H01L23/498;H01L25/065;H01L25/16;H05K1/14;H05K3/20;H05K3/32;H05K3/40;(IPC1-7):B05D5/12 主分类号 B23K3/06
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