GAS DECOMPOSITION DISPOSAL METHOD AND APPARATUS FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a gas decomposition disposal method and apparatus wherein decomposition efficiency is improved by maintaining stable discharge with a low power. SOLUTION: In a method of effecting gas decomposition disposal by applying electric field between an external electrode 1 having a honeycomb structure and an internal electrode 2 located at a center of a cell of the honeycomb structure in order that a gas flowing through the cell of the honeycomb structure undergo plasma excitation, a solid dielectric 3 is disposed on an electrode- opposite face of the outer electrode 1 and/or the internal electrode 2. The solid dielectric 3 is a metal oxide film made of a mixture of 5-50 wt.% of titanium oxide and 50-95 wt.% of aluminum oxide or a metal oxide film containing zirconium oxide.