| 摘要 |
PROBLEM TO BE SOLVED: To obtain fine ITO powder having sufficiently high true specific gravity and compacting density and excellent in temp. stability at the time of heating in a process for forming a transparent electrically conductive thin film. SOLUTION: This fine ITO powder has a corundum type crystal form, >=6.5 g/cc true specific gravity, >=3.0 g/cc compacting density, <30μV/cc Seebeck coefft. at ordinary temp. and <80μV/cc Seebeck coefft. after heating at 200 deg.C. An aq. soln. contg. indium and tin salts is neutralized with ammonia, the pH of the reaction soln., is controlled to the range of 6.8-7.5 and the resultant precipitate is separated by filtration, dried, washed, calcined at 600-700 deg.C in the air and fired under reduction at 350-450 deg.C in a reducing atmosphere to obtain the fine ITO powder.
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