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发明名称
ATOMIC EPITAXY APPARATUS FOR CVD AND LIQUID SOURCE SUPPLY APPARATUS FOR CVD
摘要
申请公布号
KR100199008(B1)
申请公布日期
1999.06.15
申请号
KR19960062350
申请日期
1996.12.06
申请人
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
YOUN, SUN-JIN;LEE, JUNG-HWAN;NAM, KI-SU
分类号
C23C16/44;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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