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发明名称
OPTICAL SYSTEM OF EXPOSURE APPARATUS
摘要
申请公布号
KR100204578(B1)
申请公布日期
1999.06.15
申请号
KR19960038191
申请日期
1996.09.04
申请人
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
LEE, KA-KHYUN;KIM, DO-HUN;JUNG, HAE-BIN;YU, HYUNG-JUN
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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