DYNAMIC DRIVING AIR CLEAN ROOM AND CONTROLLING METHOD THEREOF,申请号KR19950065738-传众专利搜索

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发明名称	DYNAMIC DRIVING AIR CLEAN ROOM AND CONTROLLING METHOD THEREOF
摘要
申请公布号	KR100192962(B1)	申请公布日期	1999.06.15
申请号	KR19950065738	申请日期	1995.12.29
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	LEE, JOONG-SUN;KIM, DAE-YUL;AN, YO-HAN;CHUN, JAE-KANG
分类号	B08B5/02;B08B15/02;F24F3/16;F24F7/007;F24F7/06;(IPC1-7):H01L21/02	主分类号	B08B5/02
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