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经营范围
发明名称
SEMICONDUCTOR WAFER LOAD LOCK CHAMBER
摘要
申请公布号
KR200149296(Y1)
申请公布日期
1999.06.15
申请号
KR19960014741U
申请日期
1996.06.03
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SON, BYOUNG-IN
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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