RETICLE FOR DEFECT MONITORING,申请号KR19950017293-传众专利搜索

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发明名称	RETICLE FOR DEFECT MONITORING
摘要
申请公布号	KR100199371(B1)	申请公布日期	1999.06.15
申请号	KR19950017293	申请日期	1995.06.24
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	LIM, KUN-HO;KIM, JONG-HOE
分类号	G03F1/00;H01L21/66;H01L23/544;(IPC1-7):H01L21/66	主分类号	G03F1/00
代理机构		代理人
主权项
地址

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