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发明名称
DISPOSITIF D'EXCITATION D'UN GAZ PAR PLASMA D'ONDE DE SURFACE
摘要
申请公布号
FR2762748(B1)
申请公布日期
1999.06.11
申请号
FR19970005147
申请日期
1997.04.25
申请人
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE
发明人
MOISAN MICHEL;ETEMADI ROXANE;ROSTAING JEAN CHRISTOPHE
分类号
B01J19/12;H05H1/46;(IPC1-7):H05H1/46;B01J19/08
主分类号
B01J19/12
代理机构
代理人
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地址
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