| 摘要 |
<p>A stage positioning device enabling a fine and stable positioning operation, comprising a stage (11) on which a sample (W) to which a beam (B) is applied, is placed, actuators (12a, 12b, 12c and 12d) which support the stage (11) in a noncontact and levitated state and control its movement, a first sensor (13) which measures relative displacement between the stage (11) and actuators (12a, 12b, 12c and 12d), a second sensor (36) which measures a relative displacement between an actual beam (B) application position and a target beam application position on the sample and a controller (15) which controls the movement of the stage so as to reduce the relative displacement detected by the sensor (36), wherein the stage is a magnetically levitated stage consisting of a levitation unit which has a table part on which the sample is placed and side plates hanging down from the outer circumference of the table part and a fixed unit which has the actuators which supports the levitation unit with the magnetic forces of magnets and, at the same time, controls the position of the levitation unit, and the fixed unit is covered with the table part and side plates of the levitation unit.</p> |
