| 摘要 |
<p>A polisher (10) comprises a turn table (12) having first and second end surfaces which are substantially normal to an axis of the turn table (12). The first end surface defines a polishing surface (16) for polishing an article (W). A drive shaft (20) is connected to the turn table (12) in such a manner that the shaft (20) extends along the axis of the turn table (12) from the second end surface of the turn table (12). The polisher (10) further includes a cooling system (60) which comprises a cooling fluid path (68) provided in the turn table (12) for passing a cooling fluid therethrough to deprive the polishing surface (16) of heat generated in a polishing operation and a fluid coupler (70) provided at the center of the first end surface of the turn table (12) for fluidly connecting the cooling fluid path (68) with a cooling fluid supply outside of the turn table (12).</p> |
