| 摘要 |
<p>A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, comprising a mixture of solvent species A, B and C in the proportion A:B:C wherein A is from about 3 to about 7 parts by volume, B is from about 2 to about 6 parts by volume, and C is present up to about 3 parts by volume, wherein such parts by volume are based on the total volume of the mixture, and wherein A is a C6-C8 alkane, B is a C8-C12 alkane, A and B are different from one another, and C is selected from the group consisting of glyme-based solvents (glyme, diglyme, tetraglyme, etc.) and polyamines. The particular solvent composition including octane, decane and polyamine in an approximate 5:4:1 weight ratio is particularly usefully employed in the formation of SrBi2Ta2O9 films.</p> |
