ELECTRON BEAM DEPOSITION DEVICE AND METHOD OF MANUFACTURING THIN FILM BY USING THE DEPOSITION DEVICE

摘要

An electron beam deposition device capable of manufacturing a high-quality deposited film, the method of manufacturing a deposited thin film by using the electron beam deposition device and a high quality compound thin film. The electron beam deposition device provided with at least one evaporation furnace, one electron gun and one arbitrary waveform signal generator, characterized in that the electron gun has a means of scanning with an electron beam two-dimensionally and, further, is so connected to receive signals outputted from the arbitrary waveform signal generator as electron beam scanning signal and/or electron beam intensity signals.