| 摘要 |
<p>A method for making particles coated with a diamond-like carbon, which can include additive components. The method comprises subjecting a multiciplicity of particles to a carbon-based plasma in an evacuated radio frequency powered capacitively coupled reactor system in which ion sheaths are formed around the electrodes and wherein the particles are agitated in such a manner as to expose their surfaces to the reactive species in the plasma while keeping the particles substantially within an ion sheath. The advantages of the present invention include (i) the efficient deposition of DLC onto particles at high deposition rates, (ii) the deposition of densely-packed DLC coatings, (iii) the ability to perform in situ surface cleaning of particles by ion bombardment with oxygen- and argon-containing plasmas prior to deposition of DLC, and (iv) the ability to tailor the bulk and the surface properties of the coatings by manipulating the composition of the coating and the intensity of ion bombardment during the coating process.</p> |
