发明名称 METHOD AND SYSTEM FOR MOUNTING SEMICONDUCTOR ELEMENT SEMICONDUCTOR ELEMENT SEPARATOR, AND PRODUCTION OF IC CARD
摘要 PROBLEM TO BE SOLVED: To produce a high quality product by dicing a thin semiconductor wafer pasted to an adhesive sheet into unit semiconductor elements, peeling off the group of semiconductor elements at high speed from the adhesive sheet without damaging or cutting each semiconductor element, and then mounting each semiconductor element on a mounting board. SOLUTION: A system for dicing a semiconductor wafer pasted to an adhesive sheet into unit semiconductor elements comprises a separating means 100 for peeling off the group of semiconductor elements from the adhesive sheet, a means 200 for transferring each semiconductor element in the group to the mounting position, and a means 300 for mounting the semiconductor element on a board, while positioning relatively the electrodes formed on the semiconductor element and the electrodes formed on the mounting board.
申请公布号 JPH11150133(A) 申请公布日期 1999.06.02
申请号 JP19980227052 申请日期 1998.08.11
申请人 HITACHI LTD 发明人 ODAJIMA HITOSHI;FUTAKI KAZUYUKI;MATSUOKA MASATO;NAKAGAWA TOMOCHIKA;NAKAKUKI SHOJI
分类号 G06K19/077;H01L21/301;H01L21/50;H01L21/52;H01L21/67;H01L21/68 主分类号 G06K19/077
代理机构 代理人
主权项
地址