| 摘要 |
PROBLEM TO BE SOLVED: To improve the uniformity of irradiation by combining a specific pulsed layer, a condensing lens and a stimulated Brillown (SBS) phase cojugate mirror to take out the output of a diffraction limit which is capable of being adapted to a wide wavelength range without damaging a quartz glass and which does not generate a front wave distortion. SOLUTION: A pulsed laser whose wavelength range is roughly 0.2-2.3μm, whose pulse life is 10 nsec to 1μsec, whose output is >=15 mJ/pulse and the SBS phase conjugate mirror medium, a condensing lens 1 whose focal length is 250-1000 mm and an SBS phase conjugate mirror 2 in which quartz glass whose absorption coefficient is <=5×10<4> are combined for this device. That is, the SBS phase conjugate mirror which does not generate the damage of a laser even with respect to a high energy light whose incident energy density is 1 J/cm<2> (peak intensity is 50 MV) is constituted by using quartz glass as a solid medium, setting an excitation pulse width longer than the relaxation time of a acoustic wave and having the length of an interaction longer while squeezing a beam with the lens whose focal length is long. |
