发明名称 MEMORY ELEMENT OF FIELD EFFECT ELEMENT
摘要 PROBLEM TO BE SOLVED: To allow memory function using a single field effect transistor by applying an electric field to a gate for a carrier in a channel to move into a trap region, and changing a drain current amount, based on presence of electric charge amount in trap. SOLUTION: An Si layer and an Si1- XGeX mixed-crystalline layer are lattice- conformed to an Si1- XGeX mixed-crystal for growth, so that Si layer such as biaxial tensile stress is applied is formed. A fine Si crystal region is embedded in the Si1- XGeX mixed-crystal of a barrier layer to indicate a specified band structure. Thus when a positive voltage is applied to a gate electrode, electrons in a channel are confined in a fine Si crystal region through tunnel effect. In this state, a region close to a channel is charged negative so that a drain current is reduced. By monitoring changes in the current amount, whether fine crystal regions are charged or not is discriminated.
申请公布号 JPH11150194(A) 申请公布日期 1999.06.02
申请号 JP19970314793 申请日期 1997.11.17
申请人 HITACHI LTD 发明人 NAKAGAWA KIYOKAZU;SUGII NOBUYUKI;YAMAGUCHI SHINYA;MIYAO MASANOBU
分类号 H01L21/8247;H01L27/10;H01L29/06;H01L29/66;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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