发明名称 THERMAL TREATMENT EQUIPMENT OF ARTICLE
摘要 PROBLEM TO BE SOLVED: To simplify carrying-in and carrying-out of an article when an article, such as optical disk, is carried in an annealing furnace and thermally treated. SOLUTION: An index table 2 is installed. Than a part of the index table 2 is positioned outside an annealing furnace 1, and the remaining part is positioned in the annealing furnace 1. An entrance part 4 and an exit part 5 where a magazine 3 on the index table 2 capable of entering and exiting are installed on a wall part which partitions the inside and the outside of the annealing furnace 1, and shutters 6, 7 for opening and closing are installed. A disk supplying equipment 8 for supplying an optical disk to the magazine 3 at a disk supplying position on the index table 2 outside the annealing furnace 1, and a disk discharging equipment 9 for discharging the optical disk after thermal treatment from the magazine 3 at a disk discharging position on the index table 2 outside the annealing furnace 1 are installed.
申请公布号 JPH11150171(A) 申请公布日期 1999.06.02
申请号 JP19970316788 申请日期 1997.11.18
申请人 KAO CORP 发明人 TSUURA TOKUO;SAITO TADASHI
分类号 G11B7/26;H01L21/324;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 G11B7/26
代理机构 代理人
主权项
地址