Verwendung einer Reinigungsplatte für Halbleiterherstellungsvorrichtung,申请号DE19906032849T-传众专利搜索

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发明名称	Verwendung einer Reinigungsplatte für Halbleiterherstellungsvorrichtung
摘要
申请公布号	DE69032849(T2)	申请公布日期	1999.06.02
申请号	DE19906032849T	申请日期	1990.09.07
申请人	KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP	发明人	KAMATA, YUTAKA, YOKOHAMA-SHI, KANAGAWA-KEN, JP
分类号	H01L21/677;H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/677
代理机构		代理人
主权项
地址

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