| 摘要 |
<p>PROBLEM TO BE SOLVED: To ensure that a nozzle plate with nozzles, each of which consists of a small dia. straight part and a large dia. tapered part as a nozzle structure with microdia. pores is certainly manufactured. SOLUTION: The method for manufacturing a nozzle plate with plural nozzles, each of which consists of a small dia. straight part and a large dia. tapered part is to use a substrate 54 with plural conical protrusions 52 and electroform a nozzle-formed layer 58 covering the surface with the conical protrusions 52 of the substrate 54 and separate the nozzle-formed layer 58 from the substrate 54 and further, emit a laser beam to parts where remain the marks of the tip parts of the conical protrusions 52 on the nozzle-formed layer 58 from the side on which the conical protrusions 52 have been present before, and thereby form through holes in the remaining marks of the tip parts of the conical protrusions 52 on the nozzle-formed layer 58 to use the remaining marks of the tip parts of the conical protrusions 52 and the through holes as the nozzles 32.</p> |
