| 摘要 |
<p>PROBLEM TO BE SOLVED: To form a liquid layer of treatment liquid having a thickness required for processing, to the surface even if the periphery of a board bends. SOLUTION: An LCD substrate G is held horizontally by a spin chuck 30, and the surface of the LCD substrate G held horizontally is supplied with developer from a developer supply nozzle 32. A developer holding means 35 is arranged in the position not in contact with the surface of the LCD substrate and besides in contact with the developer supplied to the surface of the LCD substrate G, in the periphery, at least, of the surface of the LCD substrate G. A liquid layer 55 of the developer is held between the developer holding means 35 and the LCD substrate G, on the LCD substrate G.</p> |
