| 摘要 |
PROBLEM TO BE SOLVED: To provide a microbridge structure having an improved mechanical strength. SOLUTION: A microbridge structure is provided with a thin film section 2 which is provided apart from a substrate 1 and supporting sections 3 and 4 which are formed in the peripheral section of the thin film section 2 apart from the substrate 1 for supporting the thin film section 2. The supporting sections 3 and 4 are reinforced with a reinforcing section 6. In addition, the thin film section 2 is also reinforced with at least part of the reinforcing section 6 provided in part of the peripheral section of the thin film section 2. |
