发明名称 |
Metal polishing agent and process for polishing metal using same |
摘要 |
There is provided a metal polishing agent comprising an aqueous emulsion comprising a complexing agent capable of reacting with a metal to form a water soluble metal complex and a resin particle prepared by emulsion polymerization of a vinyl compound, which is particularly useful for polishing a metal film formed on a silicon wafer by a chemical and mechanical polishing. |
申请公布号 |
EP0919602(A1) |
申请公布日期 |
1999.06.02 |
申请号 |
EP19980122108 |
申请日期 |
1998.11.23 |
申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
TAKASHIMA, MASAYUKI;SAWARA, KENICHI;SUKUMODA, ATSUSHI |
分类号 |
B24B37/00;C08J5/14;C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/321 |
主分类号 |
B24B37/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|