A high-frequency energy supply means for a high-frequency eletrodeless discharge lamp device

摘要

A high-frequency energy supply device has a group of side resonators which are electrically connected in a practically annular form, and supply high-frequency energy using resonant high-frequency electromagnetic fields generated in the center portion; and a plurality of high-frequency coupling part for coupling a plurality of high frequency energies propagated from a plurality of high-frequency propagation paths to said group of side resonators; wherein a plurality of high frequencies coupled to said group of side resonators from said plurality of high-frequency coupling means have phases and/or frequencies different from each other. <IMAGE>