| 摘要 |
PROBLEM TO BE SOLVED: To carry out processing in the surface direction and shape evaluation and composition analysis in the cross-sectional direction in a short time by forming a plurality of angles (0 deg., +90 deg.,±45 deg.) in a setting and fixing face of a specimen stand, combining the face with an apparatus inclining mechanism, and using the specimen stand in common for the processing and observation at any angle. SOLUTION: Four screw holes 11-14 are formed in this specimen stand 8 to fix a specimen in a specimen holder, and a slide type specimen fixation plate 15 for pressing a specimen 4 and three fixing screw 16 are installed. In the case the specimen stand is used for cross-sectional surface processing of the specimen 4 in the surface direction by a converged ion beam processing and observing apparatus, the specimen 4 is fixed by using the screw hole 11. In order to observe and analyze the processed specimen 4 in the cross-sectional direction, the specimen is fixed in the specimen holder by the screw hole 13 and fixed in a scanning electron microscope. Observation and analysis from the direction at±45 deg. can be carried out by the use of the screw holes 12, 14, without the use of an inclining mechanism of the apparatus.
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