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发明名称
EPITAXIAL GROWTH FURNACE
摘要
申请公布号
JPH11147788(A)
申请公布日期
1999.06.02
申请号
JP19970329691
申请日期
1997.11.14
申请人
SUPER SILICON KENKYUSHO:KK
发明人
IMAI MASATO;MAYUZUMI MASANORI;NAKAHARA SHINJI;INOUE KAZUTOSHI
分类号
C30B25/12;C30B29/06;H01L21/205;(IPC1-7):C30B25/12
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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