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发明名称
PROBE CARD
摘要
申请公布号
JPH11148948(A)
申请公布日期
1999.06.02
申请号
JP19970316802
申请日期
1997.11.18
申请人
SEIKO EPSON CORP
发明人
OKANDA MASAO
分类号
G01R1/067;G01R1/073;H01L21/66;(IPC1-7):G01R1/067
主分类号
G01R1/067
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代理人
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