Micromechanical inclination sensor, especially for motor vehicles

摘要

The micromechanical inclination sensor has a carrier plate (2) whose inclination w.r.t. the horizontal is measured, at least two integrated pressure sensor units (3) on the plate for detecting pressure applied to the plate, a wt. plate (4) connected to the carrier plate via each pressure sensor unit and an evaluation unit. The evaluation unit determines the inclination of the carrier plate from pressure sensor unit output data. The wt. plate has a base plate, pref. made of silicon, which is connected to each pressure sensor unit and a cover plate on the base plate.