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发明名称
ASSEMBLING APPARATUS OF GAP CONTROL HOUSING RING FOR DRY ETCHING APPARATUS
摘要
申请公布号
KR100190284(B1)
申请公布日期
1999.06.01
申请号
KR19960010397
申请日期
1996.04.08
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
PARK, DONG-SOO;PARK, GI-SUNG;PARK, HYUNG-WOOK;KIM, YOON-SIK
分类号
H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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