CLEANING ROOM FOR DECREASING CONTAMINATION PARTICLES BY FRICTION,申请号KR19960010542U-传众专利搜索

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发明名称	CLEANING ROOM FOR DECREASING CONTAMINATION PARTICLES BY FRICTION
摘要
申请公布号	KR200142949(Y1)	申请公布日期	1999.06.01
申请号	KR19960010542U	申请日期	1996.05.02
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	BYUN, KWANG-SUN;HAN, JAE-JUNG
分类号	H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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