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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100188445(B1)
申请公布日期
1999.06.01
申请号
KR19950006825
申请日期
1995.03.29
申请人
MATSUSHITA ELECTRONICS CORPORATION
发明人
MATSUMOTO, SHOJI;NAGANO, YOSHIHISA;SHIMADA, YASUHIRO;IZUTSU, YASUFUI
分类号
H01L21/302;H01L21/02;H01L21/3065;H01L21/822;H01L21/8242;H01L21/8246;H01L27/04;H01L27/10;H01L27/105;H01L27/108;(IPC1-7):H01L27/04;H01L21/82
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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