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发明名称
PSG FILM PATTERN FORMING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100190369(B1)
申请公布日期
1999.06.01
申请号
KR19950050974
申请日期
1995.12.16
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
LEE, TAE-GOOK;KIM, SANG-HOON
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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