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发明名称
ION MIXING SOURCE APPARATUS FOR ION PLATING
摘要
申请公布号
KR100188270(B1)
申请公布日期
1999.06.01
申请号
KR19960015196
申请日期
1996.05.09
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, JONG-KUK;CHUNG, TAE-SAN;YOO, JONG-BAG
分类号
H01L21/18;(IPC1-7):H01L21/18
主分类号
H01L21/18
代理机构
代理人
主权项
地址
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