| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a rotary joint in which flow of a polishing fluid and the supply of electricity to a polishing surface detector can be effected while the polishing fluid is sealed between relative rotation members. SOLUTION: A rotor 2 is freely rotationally supported on a joint main body 1 and has a polishing pad 104 attached thereto. A sealed space 50 which is sealed by a pair of sealing devices 5, 5 having respective sealing rings 51, 52 is formed between the joint main body 1 and the rotor 2. A series of polishing fluid passages 7 communicated to one another via the sealing space 50 are formed in the joint main body 1 and the rotor 2, and a power distribution route leading from a power unit to the polishing surface detector of the polishing pad 104 is formed. The power distribution route comprises a rotary connector 4, which comprises the connector part 40 of the joint main body and the connector part 41 of the rotor making an electrical connection with and freely rotationally connected to the connector part 40; a wire 40a leading from the power unit to the fixed connector part 40; and a wire 41a leading from the rotating connector part 41 to the polishing surface detector through a wire passage 24 formed in the rotor 2.</p> |
