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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11145127(A)
申请公布日期
1999.05.28
申请号
JP19970309022
申请日期
1997.11.11
申请人
SONY CORP
发明人
OBARA KEIJI
分类号
C23C16/40;H01L21/31;H01L21/316;(IPC1-7):H01L21/31
主分类号
C23C16/40
代理机构
代理人
主权项
地址
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