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发明名称
SURFACE INSPECTION DEVICE FOR PHOTOMASK OR THE LIKE
摘要
申请公布号
JPH11142126(A)
申请公布日期
1999.05.28
申请号
JP19970310310
申请日期
1997.11.12
申请人
MATSUSHITA SEIKI KK
发明人
MATSUSHITA HIDEKATSU
分类号
G01B11/30;G01B21/00;G01N21/88;G01N21/93;G01N21/94;G01N21/956;(IPC1-7):G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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