ELECTROMAGNETIC APPARATUS FOR CHARGED PARTICLE

摘要

PROBLEM TO BE SOLVED: To provide an electromagnetic apparatus for charged particles having a simple coil structure. SOLUTION: In an electromagnetic apparatus 1 for charged particles comprising an outside coil 10, an inside coil 11 and a main coil 2 for deflecting charged particle beam along respective coils, the ratioα/βwhereinβis the distance between the centers of the outside coil 10 and the inside coil 11 andαis the height of the respective coil centers from the beam track face 7 is controlled to be within a range from 0.26 to 0.29 and the integral value in the beam proceeding direction of the hexa-pole magnetic field components generated in the main coil 2 is controlled to be approximately zero.